CMOS integration of capacitive, optical, and electrical interconnects
CMOS integration of capacitive, optical, and electrical interconnects
J. Lexau, X. Zheng, J. Bergey, A. Krishnamoorthy, R. Ho, R. Drost, J. Cunningham
01 June 2007
10th IEEE Int'l Interconnect Technology Conference (IITC2007), June 2007, pp. 78-80.
Venue : N/A