CMOS integration of capacitive, optical, and electrical interconnects

CMOS integration of capacitive, optical, and electrical interconnects

J. Lexau, X. Zheng, J. Bergey, A. Krishnamoorthy, R. Ho, R. Drost, J. Cunningham

01 June 2007

10th IEEE Int'l Interconnect Technology Conference (IITC2007), June 2007, pp. 78-80.


Venue : N/A